The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 17, 2014
Filed:
Sep. 06, 2011
Matthew Lipson, Stamford, CT (US);
Marcel Mathijs Theodore Marie Dierichs, Venlo, NL;
Sjoerd Nicolaas Lambertus Donders, 's-Hertogenbosch, NL;
Johannes Catharinus Hubertus Mulkens, Waalre, NL;
Bob Streefkerk, Tilburg, NL;
Ronald Wilklow, Fairfield, CT (US);
Roel DE Jonge, Veldhoven, NL;
Matthew Lipson, Stamford, CT (US);
Marcel Mathijs Theodore Marie Dierichs, Venlo, NL;
Sjoerd Nicolaas Lambertus Donders, 's-Hertogenbosch, NL;
Johannes Catharinus Hubertus Mulkens, Waalre, NL;
Bob Streefkerk, Tilburg, NL;
Ronald Wilklow, Fairfield, CT (US);
Roel De Jonge, Veldhoven, NL;
ASML Netherlands B.V., Veldhoven, NL;
ASML Holding N.V., Veldhoven, NL;
Abstract
A fluid system to provide a fluid including liquid in a part of a lithographic apparatus, the fluid system including a manifold to mix a first liquid component and a second component to form the fluid in the part of the lithographic apparatus, a controller to control a physical property of the fluid by controlling the amount of the first and/or second component used to form the fluid, and a measuring device to measure a property of the fluid and to make feedback available to the controller, wherein the controller is configured to control the physical property of the fluid based on the measured property.