The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 29, 2014
Filed:
Oct. 12, 2012
Hitachi High-technologies Corporation, Tokyo, JP;
Kaifeng Zhang, Yokohama, JP;
Takenori Hirose, Tokyo, JP;
Masahiro Watanabe, Yokohama, JP;
Tsuneo Nakagomi, Ashigarakami-gun, JP;
Shinji Honma, Ashigarakami-gun, JP;
Teruaki Tokutomi, Ashigarakami-gun, JP;
Toshihiko Nakata, Hiraduka, JP;
Takehiro Tatizaki, Yokohama, JP;
Hitachi High-Technologies Corporation, Tokyo, JP;
Abstract
To detect both of near-field light and magnetic field generated by a thermal assist type magnetic head and to perform inspection of the head, a cantilever of a scanning probe microscope has a lever in which a probe is formed, a thin magnetic film formed on a surface of the probe, and fine particles or thin film of noble metal or an alloy including noble metal formed on a surface of the magnetic film. An inspection apparatus has the cantilever, a displacement detection unit to detect vibration of the cantilever, a near-field light detection unit to detect scattered light caused by near-field light generated from a near-field light emitter and enhanced on the surface of the probe of the cantilever, and a processing unit to process signals obtained by detection with the displacement detection unit and the near-field light detection unit.