The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 29, 2014
Filed:
May. 25, 2011
Toshifumi Honda, Yokohama, JP;
Yuta Urano, Yokohama, JP;
Yukihiro Shibata, Fujisawa, JP;
Toshiyuki Nakao, Yokohama, JP;
Toshifumi Honda, Yokohama, JP;
Yuta Urano, Yokohama, JP;
Yukihiro Shibata, Fujisawa, JP;
Toshiyuki Nakao, Yokohama, JP;
Hitachi High-Technologies Corporation, Tokyo, JP;
Abstract
Disclosed is a defect inspection method which makes it possible to scan the entire surface of a sample and detect minute defects without causing thermal damage to the sample. A defect inspection method in which a pulse laser emitted from a light source is subjected to pulse division and irradiated on the surface of a sample which moves in one direction while the divided-pulse pulse laser is rotated, reflection light from the sample irradiated by the divided-pulse pulse laser is detected, the signal of the detected reflection light is processed to detect defects on the sample, and information regarding a detected defect is output to a display screen, wherein the barycentric position of the light intensity of the divided-pulse pulse laser is monitored and adjusted.