The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 22, 2014
Filed:
Oct. 15, 2010
Martijn Constant Van Beurden, Eindhoven, NL;
Irwan Dani Setija, Utrecht, NL;
Remco Dirks, Deurne, NL;
Martijn Constant Van Beurden, Eindhoven, NL;
Irwan Dani Setija, Utrecht, NL;
Remco Dirks, Deurne, NL;
ASML Netherlands B.V., Veldhoven, NL;
Abstract
A projection operator framework is described to analyze the concept of localized normal-vector fields within field-material interactions in a spectral basis, in isotropic and anisotropic media. Generate a localized normal-vector field n in a region of the structure defined by the material boundary, decomposed into sub-regions with a predefined normal-vector field and possibly corresponding closed-form integrals. Construct a continuous vector field F using the normal-vector field to select continuous components Eand D. Localized integration of normal-vector field n over the sub-regions to determine coefficients of, C. Determine components E, E, Eof the electromagnetic field by using field-material interaction operator C to operate on vector field F. Calculate electromagnetic scattering properties of the structure using the determined components of the electromagnetic field.