The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 22, 2014
Filed:
Mar. 07, 2011
Kenji Tsutsumi, Koshi, JP;
Junichi Kitano, Koshi, JP;
Osamu Miyahara, Koshi, JP;
Hideharu Kyouda, Koshi, JP;
Kenji Tsutsumi, Koshi, JP;
Junichi Kitano, Koshi, JP;
Osamu Miyahara, Koshi, JP;
Hideharu Kyouda, Koshi, JP;
Tokyo Electron Limited, Tokyo, JP;
Abstract
In the coating treatment apparatus, in a first treatment chamber, the front and rear surfaces of the substrate held by a transfer arm are inverted by a turning mechanism, and a coating solution is applied from a coating nozzle to the rear surface of the substrate. The substrate is transferred into a second treatment chamber, in which the coating solution on the rear surface is heated by a heating unit to cure, thereby forming a coating film on the rear surface of the substrate. The formation of the coating film by the coating treatment apparatus is performed before exposure processing, whereby the rear surface of the substrate can be flat for the exposure processing.