The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 15, 2014
Filed:
Dec. 17, 2010
Applicants:
Brian Reiss, Woodridge, IL (US);
Timothy Johns, Naperville, IL (US);
Michael White, Ridgefield, CT (US);
Lamon Jones, Aurora, IL (US);
John Clark, Pflugerville, TX (US);
Inventors:
Brian Reiss, Woodridge, IL (US);
Timothy Johns, Naperville, IL (US);
Michael White, Ridgefield, CT (US);
Lamon Jones, Aurora, IL (US);
John Clark, Pflugerville, TX (US);
Assignee:
Cabot Microelectronics Corporation, Aurora, IL (US);
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 21/302 (2006.01);
U.S. Cl.
CPC ...
Abstract
The invention provides a polishing composition comprising silica, an aminophosphonic acid, a polysaccharide, a tetraalkylammonium salt, a bicarbonate salt, an azole ring, and water, wherein the polishing composition has a pH of about 7 to about 11. The invention further provides a method of polishing a substrate with the polishing composition.