The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 08, 2014
Filed:
Feb. 09, 2012
Chun-chang Chen, Tainan, TW;
Shun-shing Yang, Tainan, TW;
Shih-chi Fu, Zhudong Township, TW;
Wang-pen MO, Pingtung, TW;
Hung-chang Hsieh, Hsin-Chu, TW;
Chun-Chang Chen, Tainan, TW;
Shun-Shing Yang, Tainan, TW;
Shih-Chi Fu, Zhudong Township, TW;
Wang-Pen Mo, Pingtung, TW;
Hung-Chang Hsieh, Hsin-Chu, TW;
Taiwan Semiconductor Manufacturing Company, Ltd., Hsin-Chu, TW;
Abstract
Semiconductor devices and manufacturing methods thereof are disclosed. In one embodiment, a semiconductor device includes a workpiece with a first region having a plurality of first features and a second region having a plurality of second features proximate the first region. The first region and the second region share a patterning overlap region disposed between the first region and the second region. The patterning overlap region includes a residue feature with an aspect ratio of about 4 or less.