Multi-patterning for sharp corner printing

Abstract

Mask design techniques for sharp corner printing in liquid crystal displays are disclosed using multiple patterns. The viewing angle and color quality of thin film transistor liquid crystal displays are largely dependent upon electrode corner sharpness as patterned in a given metal layer. Depending on design style, critical elements include convex angles, concave angles, or both convex and concave angles. Angle sharpness is dependent upon the resolution limit of a given exposure system. Since critical design element requirements exceed the capabilities of one mask, two or more masks are implemented. The determination of critical pattern features within a given layer identifies angles that are problematic for fabrication. The critical pattern features are decomposed into multiple mask layers. The resulting multi-pattern arrangement is used to fabricate the critical design elements that make up the needed angles.