The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 01, 2014
Filed:
Feb. 21, 2012
Sven Antoin Johan Hol, Eindhoven, NL;
Jan Van Eijk, Eindhoven, NL;
Johannes Petrus Martinus Bernardus Vermeulen, Helmond, NL;
Gerard Johannes Pieter Nijsse, Bodegraven, NL;
Simon Bernardus Cornelis Maria Martens, Waalre, NL;
Yang-shan Huang, Veldhoven, NL;
Michael Wilhelmus Theodorus Koot, Eindhoven, NL;
Jeroen DE Boeij, Eindhoven, NL;
Maarten Hartger Kimman, Veldhoven, NL;
Wei Zhou, Enschede, NL;
Sven Antoin Johan Hol, Eindhoven, NL;
Jan Van Eijk, Eindhoven, NL;
Johannes Petrus Martinus Bernardus Vermeulen, Helmond, NL;
Gerard Johannes Pieter Nijsse, Bodegraven, NL;
Simon Bernardus Cornelis Maria Martens, Waalre, NL;
Yang-Shan Huang, Veldhoven, NL;
Michael Wilhelmus Theodorus Koot, Eindhoven, NL;
Jeroen De Boeij, Eindhoven, NL;
Maarten Hartger Kimman, Veldhoven, NL;
Wei Zhou, Enschede, NL;
ASML Netherlands B.V., Veldhoven, NE;
Abstract
An electromagnetic actuator includes a first and second magnetic members that are displaceable relative to each other and are arranged to provide a magnetic circuit; and a coil configured to, in use, receive a current to generate a magnetic flux through the magnetic circuit, thereby generating a force between the first and second magnetic members in a first direction, the magnetic flux, in use, being transferred between the first and second magnetic members through a first surface of the first magnetic member and a second surface of the second magnetic member, the first and second surface being separated by an airgap, wherein the first surface and the second surface are arranged relative to each other such that an outer dimension of the first surface extends beyond an outer dimension of the second surface in a second direction substantially perpendicular to the first direction.