The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 25, 2014
Filed:
Jan. 20, 2010
Atsushi Taniguchi, Fujisawa, JP;
Taketo Ueno, Kawasaki, JP;
Yukihiro Shibata, Fujisawa, JP;
Shunji Maeda, Yokohama, JP;
Tetsuya Matsui, Hitachi, JP;
Atsushi Taniguchi, Fujisawa, JP;
Taketo Ueno, Kawasaki, JP;
Yukihiro Shibata, Fujisawa, JP;
Shunji Maeda, Yokohama, JP;
Tetsuya Matsui, Hitachi, JP;
Hitachi High-Technologies Corporation, Tokyo, JP;
Abstract
By including an illumination system and a detection system, an information collecting function of monitoring an environment, such as temperature and atmospheric pressure, and an apparatus state managing function having a feedback function of comparing the monitoring result and a design value, a theoretical calculation value or an ideal value derived from simulation results and calibrating an apparatus so that the monitoring result is brought close to the ideal value, a unit for keeping the apparatus state and apparatus sensitivity constant is provided. A control unitis configured to include a recording unit, a comparing unit, a sensitivity predicting unit, and a feedback control unit. In the comparing unit, the monitoring result transmitted from the recording unitand an ideal value stored in a databaseare compared with each other. When a difference between the ideal value and the monitoring result exceeds a predetermined threshold, the feedback control unitcorrects the illumination system and the detection system.