The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Mar. 25, 2014

Filed:

May. 21, 2007
Applicants:

Toshihisa Isono, Hirakata, JP;

Shinji Tachibana, Hirakata, JP;

Tomohiro Kawase, Hirakata, JP;

Naoyuki Omura, Hirakata, JP;

Inventors:

Toshihisa Isono, Hirakata, JP;

Shinji Tachibana, Hirakata, JP;

Tomohiro Kawase, Hirakata, JP;

Naoyuki Omura, Hirakata, JP;

Assignee:

C. Uyemura & Co., Ltd., Osaka-shi, JP;

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
C25D 3/00 (2006.01); C25D 3/38 (2006.01); C25D 3/02 (2006.01); H01L 21/02 (2006.01); H05K 3/42 (2006.01);
U.S. Cl.
CPC ...
C25D 3/38 (2013.01); C25D 3/00 (2013.01); C25D 3/02 (2013.01); H01L 21/02 (2013.01); H05K 3/424 (2013.01);
Abstract

A copper electroplating bath useful in filling non-through holes formed on a substrate which contains a water-soluble copper salt, sulfuric acid, and chloride ions and further contains a brightener, a carrier, and a leveler as additives, wherein the leveler contains at least one water-soluble polymer containing quaternary nitrogen, tertiary nitrogen, or both which are cationizable in a solution. In the copper electroplating bath, the filling power for non-through holes formed on a substrate can be easily controlled so as to fit to the size of the holes only by changing the quaternary nitrogen to tertiary nitrogen ratio of the water-soluble polymer to be used as the leveler, which enables copper electroplating of non-through holes of various sizes with a good fit to the sizes.


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