The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 18, 2014
Filed:
Sep. 04, 2012
Arie Jeffrey Den Boef, Waalre, NL;
Jozef Petrus Henricus Benschop, Veldhoven, NL;
Ralph Brinkhof, 's-Hertogenbosch, NL;
Willem Jurrianus Venema, Eindhoven, NL;
Lukasz Jerzy Macht, Eindhoven, NL;
Laurent Khuat Duy, Eindhoven, NL;
Dimitra Sarri, Eindhoven, NL;
Arie Jeffrey Den Boef, Waalre, NL;
Jozef Petrus Henricus Benschop, Veldhoven, NL;
Ralph Brinkhof, 's-Hertogenbosch, NL;
Willem Jurrianus Venema, Eindhoven, NL;
Lukasz Jerzy Macht, Eindhoven, NL;
Laurent Khuat Duy, Eindhoven, NL;
Dimitra Sarri, Eindhoven, NL;
ASML Netherlands B.V., Veldhoven, NL;
Abstract
A level sensor for measuring a position of a surface of a substrate includes a projection unit including an emitter for emitting a radiation beam towards the substrate and a projection grating including a measurement grating and an aperture, such that the radiation beam incident on the projection grating is divided into a measurement radiation beam and a capture radiation beam. The level sensor further includes a detection unit including a first and second measurement detector, a first and second capture detector, a detection grating, and a first and second optical unit. The detection grating includes a ruled grating with multiple rules, which direct radiation towards the first and second measurement detector via the first and second optical unit, and a capture element directing radiation towards the first and second capture detector via the first and second optical unit.