The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 25, 2014
Filed:
Jun. 13, 2008
Hiroki Hayashi, Takamatsu, JP;
Takashi Konno, Takamatsu, JP;
Kouji Iwasaki, Chiba, JP;
Masatoshi Yasutake, Chiba, JP;
Junichi Tashiro, Chiba, JP;
Hiroki Hayashi, Takamatsu, JP;
Takashi Konno, Takamatsu, JP;
Kouji Iwasaki, Chiba, JP;
Masatoshi Yasutake, Chiba, JP;
Junichi Tashiro, Chiba, JP;
AOI Electronics Co., Ltd., Takamatsu-shi, JP;
Abstract
Small tweezers having a pair of arms openable and closable is moved closer to a sample and grips a particle attached on a surface of the sample and carries it onto an adhesion member to attach it thereto. The small tweezers are opened to release the particle and brought away from the adhesion member to leave the particle on the adhesion member. A particle removing device includes small tweezers having a pair of arms openable and closable; an opening/closing driving unit that drives the arm or arms to open/close the small tweezers; a stage mounting an adhesion member that attaches thereto a particle to withdraw the particle; and a moving mechanism that moves the small tweezers between the sample and the adhesion member mounted on the stage. Also, an atomic force microscope and a charged ion beam apparatus that include the particle removing device are disclosed.