The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 11, 2014
Filed:
Dec. 27, 2010
Akifumi Ueda, Toyohashi, JP;
Hidetaka Nakagawara, Toyohashi, JP;
Kazuo Watanabe, Koshigaya, JP;
Shigeki Watanabe, Koshigaya, JP;
Wei Jen Lan, Taoyuan Hsien, TW;
Chao Wen Lin, Taoyuan Hsien, TW;
Akifumi Ueda, Toyohashi, JP;
Hidetaka Nakagawara, Toyohashi, JP;
Kazuo Watanabe, Koshigaya, JP;
Shigeki Watanabe, Koshigaya, JP;
Wei Jen Lan, Taoyuan Hsien, TW;
Chao Wen Lin, Taoyuan Hsien, TW;
Micro Process Inc, Koshigaya-shi, JP;
Everlight Chemical Industrial Corporation, Taoyuan Hsien, TW;
Mitsubishi Rayon Co., Ltd., Tokyo, JP;
Abstract
The present invention is related to a photosensitive resin composition containing: a vinyl-based copolymer (I) obtained by polymerizing a monomer mixture containing a monomer (a) having a phenolic hydroxyl group and a carboxyl group-containing vinyl monomer (b); a quinonediazide compound (II) and a compound (III) represented by the following formula (5), and to a photosensitive dry film and a method for forming a patter by using the photosensitive resin composition. According to the present invention, it is possible to provide a photosensitive resin composition which can form a resist film in which the occurrence of crack is suppressed, the film reduction of the unexposed area is suppressed, and sensitivity and resolution are excellent, and to provide a photosensitive dry film and a method for forming a pattern by using the photosensitive resist composition [In the formula, Y is a straight or branched hydrocarbon group of 1 to 6 carbon atoms; 1 and m are respectively independently an integer of 1 to 3; n is 1 or 2; p and q are respectively independently 0 or 1.]