The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 04, 2014
Filed:
Nov. 29, 2010
Remco Dirks, Deurne, NL;
Irwan Dani Setija, Utrecht, NL;
Markus Gerardus Martinus Maria Van Kraaij, Eindhoven, NL;
Martijn Constant Van Beurden, Eindhoven, NL;
Remco Dirks, Deurne, NL;
Irwan Dani Setija, Utrecht, NL;
Markus Gerardus Martinus Maria Van Kraaij, Eindhoven, NL;
Martijn Constant Van Beurden, Eindhoven, NL;
ASML Netherlands B.V., Veldhoven, NL;
Abstract
Numerical calculation of electromagnetic scattering properties and structural parameters of periodic structures is disclosed. A reflection coefficient has a representation as a bilinear or sesquilinear form. Computations of reflection coefficients and their derivatives for a single outgoing direction can benefit from an adjoint-state variable. Because the linear operator is identical for all angles of incidence that contribute to the same outgoing wave direction, there exists a single adjoint-state variable that generates all reflection coefficients from all incident waves that contribute to the outgoing wave. This adjoint-state variable can be obtained by numerically solving a single linear system, whereas one otherwise would need to solve a number of linear systems equal to the number of angles of incidence.