The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 04, 2014
Filed:
Dec. 27, 2011
Toshiyuki Ikeuchi, Nirasaki, JP;
Pao-hwa Chou, Nirasaki, JP;
Kazuya Yamamoto, Nirasaki, JP;
Kentarou Sera, Nirasaki, JP;
Toshiyuki Ikeuchi, Nirasaki, JP;
Pao-Hwa Chou, Nirasaki, JP;
Kazuya Yamamoto, Nirasaki, JP;
Kentarou Sera, Nirasaki, JP;
Tokyo Electron Limited, , JP;
Abstract
A control unit heats a reaction pipe to a load temperature by controlling a temperature-raising heater, and then makes semiconductor wafers received in the reaction pipe. Next, the control unit heats the reaction pipe in which the semiconductor wafers are received to a film formation temperature by controlling the temperature-raising heater, and then forms thin films on the semiconductor wafers by supplying a film forming gas into the reaction pipe from a process gas introducing pipe. Also, the control unit sets the load temperature to a temperature higher than the film formation temperature.