The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 28, 2014
Filed:
Dec. 23, 2010
Guido DE Boer, Leerdam, NL;
Johnny Joannes Jacobus Van Baar, Hengelo, NL;
Kaustubh Prabodh Padhye, Zoetermeer, NL;
Robert Mossel, Capelle a/d Ijssel, NL;
Niels Vergeer, Rotterdam, NL;
Stijn Willem Herman Karel Steenbrink, The Hague, NL;
Guido De Boer, Leerdam, NL;
Johnny Joannes Jacobus Van Baar, Hengelo, NL;
Kaustubh Prabodh Padhye, Zoetermeer, NL;
Robert Mossel, Capelle a/d Ijssel, NL;
Niels Vergeer, Rotterdam, NL;
Stijn Willem Herman Karel Steenbrink, The Hague, NL;
Mapper Lithography IP B.V., Delft, NL;
Abstract
A capacitive sensing system having two or more capacitive sensors, one or more AC power sources for energizing the capacitive sensors, and a signal processing circuit for processing signals from the sensors. The sensors are arranged in pairs, wherein the one or more AC power sources are arranged to energize a first sensor of a pair of the sensors with an alternating current or voltage 180 degrees out of phase to a current or voltage for a second sensor of the pair of sensors, and wherein a pair of the sensors provides a measuring unit for a single measured distance value, the signal processing circuit receiving an output signal from each sensor of the pair and generating a measured value related to the average distance between the sensors of the pair and the target.