The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 28, 2014
Filed:
Feb. 18, 2011
Yasunari Sohda, Kawasaki, JP;
Takeyoshi Ohashi, Tokyo, JP;
Kaori Shirahata, Mitaka, JP;
Keiichiro Hitomi, Delmar, NY (US);
Yasunari Sohda, Kawasaki, JP;
Takeyoshi Ohashi, Tokyo, JP;
Kaori Shirahata, Mitaka, JP;
Keiichiro Hitomi, Delmar, NY (US);
Hitachi High-Technologies Corporation, Tokyo, JP;
Abstract
Provided is a high-resolution scanning electron microscope with minimal aberration, and equipped with an electro-optical configuration that can form a tilted beam having wide-angle polarization and a desired angle, without interfering with an electromagnetic lens. In the scanning electron microscope, an electromagnetic deflector () is disposed above a magnetic lens (), and a control electrode () that accelerates or decelerates electrons is provided so at to overlap (in such a manner that the height positions overlap with respect to the vertical direction) with the electromagnetic deflector (). In wide field polarization, electrodes are accelerated, and in tilted beam formation, electrons are decelerated.