The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 14, 2014
Filed:
Jun. 03, 2010
Hiroshi Tsuji, Hitachinaka, JP;
Kouji Ishiguro, Hitachinaka, JP;
Ichiro Tachibana, Hitachinaka, JP;
Naomasa Suzuki, Hitachinaka, JP;
Katsunori Onuki, Hitachi, JP;
Hiroshi Tsuji, Hitachinaka, JP;
Kouji Ishiguro, Hitachinaka, JP;
Ichiro Tachibana, Hitachinaka, JP;
Naomasa Suzuki, Hitachinaka, JP;
Katsunori Onuki, Hitachi, JP;
Hitachi High-Technologies Corporation, Tokyo, JP;
Abstract
Disclosed is a high resolution and high throughput charged particle radiation device that attenuates the natural vibration of an ion pump in a short time, excited by a reaction force at the time of driving the stage, and prevents occurrence of a loop of force and a loop of current. The charged particle radiation device includes a sample chamber () for disposing a sample () therein, a charged particle radiation optical lens tube () for irradiating the sample () with charged particle radiation (), ion pumps () for evacuating the charged particle radiation optical lens tube (), a frame () fixedly attached to the sample chamber (), the frame () facing one end of each of the ion pumps (), and vibration absorbers provided between the frame () and the one end of each of the ion pumps (), each of the vibration absorbers including a layered structure which includes a viscoelastic sheet () sandwiched between metal plates ().