The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 07, 2014
Filed:
May. 25, 2010
Yi-xiang Wang, Fremont, CA (US);
Joe Wang, Campbell, CA (US);
Xuedong Liu, San Jose, CA (US);
Zhongwei Chen, San Jose, CA (US);
Yi-Xiang Wang, Fremont, CA (US);
Joe Wang, Campbell, CA (US);
Xuedong Liu, San Jose, CA (US);
Zhongwei Chen, San Jose, CA (US);
Hermes Microvision, Inc., Hsin-chu, TW;
Abstract
The present invention generally relates to a detection unit of a charged particle imaging system. More particularly, portion of the detection unit can move into or out of the detection system as imaging condition required. With the assistance of a Wein filter (also known as an E×B charged particle analyzer) and a movable detector design, the present invention provides a stereo imaging system that suitable for both low current, high resolution mode and high current, high throughput mode. Merely by way of example, the invention has been applied to a scanning electron beam inspection system. But it would be recognized that the invention could apply to other system using charged particle beam as an observation tool.