The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 07, 2014
Filed:
Aug. 02, 2011
Kenji Watanabe, Tokyo, JP;
Masahiro Hatakeyama, Tokyo, JP;
Yoshihiko Naito, Tokyo, JP;
Tatsuya Kohama, Tokyo, JP;
Kenji Terao, Tokyp, JP;
Takeshi Murakami, Tokyo, JP;
Takehide Hayashi, Tokyo, JP;
Kiwamu Tsukamoto, Tokyo, JP;
Hiroshi Sobukawa, Tokyo, JP;
Norio Kimura, Tokyo, JP;
Kenji Watanabe, Tokyo, JP;
Masahiro Hatakeyama, Tokyo, JP;
Yoshihiko Naito, Tokyo, JP;
Tatsuya Kohama, Tokyo, JP;
Kenji Terao, Tokyp, JP;
Takeshi Murakami, Tokyo, JP;
Takehide Hayashi, Tokyo, JP;
Kiwamu Tsukamoto, Tokyo, JP;
Hiroshi Sobukawa, Tokyo, JP;
Norio Kimura, Tokyo, JP;
Ebara Corporation, Tokyo, JP;
Abstract
An electro-optical inspection apparatus prevents adhesion of dust or particles to a sample surface, wherein a stage on which a sample is placed is disposed inside a vacuum chamber that can be evacuated, and a dust collecting electrode is disposed to surround a periphery of the sample. The dust collecting electrode is applied with a voltage having the same polarity as a voltage applied to the sample and an absolute value that is the same or larger than an absolute value of the voltage. Because dust or particles adhere to the dust collecting electrode, adhesion of the dust or particles to the sample surface can be reduced. Instead of using the dust collecting electrode, it is possible to form a recess on a wall of the vacuum chamber, or to dispose on the wall a metal plate having a mesh structure to which a predetermined voltage is applied.