The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 07, 2014
Filed:
Dec. 18, 2008
Nicole Auth, Gustavsburg, DE;
Petra Spies, Mainz, DE;
Tristan Bret, Darmstadt, DE;
Rainer Becker, Pfungstadt, DE;
Thorsten Hofmann, Rodgau, DE;
Klaus Edinger, Lorsch, DE;
Nicole Auth, Gustavsburg, DE;
Petra Spies, Mainz, DE;
Tristan Bret, Darmstadt, DE;
Rainer Becker, Pfungstadt, DE;
Thorsten Hofmann, Rodgau, DE;
Klaus Edinger, Lorsch, DE;
Carl Zeiss SMS GmbH, Jena, DE;
Abstract
The present method relates to processes for the removal of a material from a sample by a gas chemical reaction activated by a charged particle beam. The method is a multiple step process wherein in a first step a gas is supplied which, when a chemical reaction between the gas and the material is activated, forms a non-volatile material component such as a metal salt or a metaloxide. In a second consecutive step the reaction product of the first chemical reaction is removed from the sample.