The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 31, 2013
Filed:
May. 10, 2012
Tomas Plettner, San Ramon, CA (US);
Mehran Nasser-ghodsi, Hamilton, MA (US);
Robert G. Haynes, Pleasanton, CA (US);
Rudy F. Garcia, Union City, CA (US);
Tomas Plettner, San Ramon, CA (US);
Mehran Nasser-Ghodsi, Hamilton, MA (US);
Robert G. Haynes, Pleasanton, CA (US);
Rudy F. Garcia, Union City, CA (US);
KLA-Tencor Corporation, Milpitas, CA (US);
Abstract
One embodiment disclosed relates to an apparatus forming an electrical conduction path through an insulating layer on a surface of a substrate. A first radiation source is configured to emit radiation to a first region of the insulating layer, and a first electrical contact is configured to apply a first bias voltage to the first region. A second radiation source is configured to emit radiation to a second region of the insulating layer, and a second electrical contact is configured to apply a second bias voltage to the second region. The conductivities of the regions are increased by the radiation such that conductive paths are formed through the insulating layer at those regions. In one implementation, the apparatus may be used in an electron beam instrument. Another embodiment relates to a method of forming an electrical conduction path through an insulating layer. Other embodiments, aspects and features are also disclosed.