The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 24, 2013
Filed:
Aug. 26, 2011
Ramakrishnan Ayothi, San Jose, CA (US);
William D. Hinsberg, Fremont, CA (US);
Sally A. Swanson, San Jose, CA (US);
Gregory M. Wallraff, San Jose, CA (US);
Ramakrishnan Ayothi, San Jose, CA (US);
William D. Hinsberg, Fremont, CA (US);
Sally A. Swanson, San Jose, CA (US);
Gregory M. Wallraff, San Jose, CA (US);
International Business Machines Corporation, Armonk, NY (US);
JSR Corporation, Tokyo, JP;
Abstract
Provided are novel symmetrical and asymmetrical bifunctional photodecomposable bases (PDBs) with dicarboxylate anion groups that show increased imaging performance. Also provided are photoresist compositions prepared with the bifunctional dicarboxylated PDBs and lithography methods that use the photoresist compositions of the present invention.