The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 17, 2013
Filed:
Jul. 30, 2007
Ashok Kulkarni, San Jose, CA (US);
Chien-huei (Adam) Chen, San Jose, CA (US);
Cecelia Campochiaro, Sunnyvale, CA (US);
Richard Wallingford, San Jose, CA (US);
Yong Zhang, Cupertino, CA (US);
Brian Duffy, San Jose, CA (US);
Ashok Kulkarni, San Jose, CA (US);
Chien-Huei (Adam) Chen, San Jose, CA (US);
Cecelia Campochiaro, Sunnyvale, CA (US);
Richard Wallingford, San Jose, CA (US);
Yong Zhang, Cupertino, CA (US);
Brian Duffy, San Jose, CA (US);
KLA-Tencor Technologies Corp, Milpitas, CA (US);
Abstract
Various methods, carrier media, and systems for monitoring a characteristic of a specimen are provided. One computer-implemented method for monitoring a characteristic of a specimen includes determining a property of individual pixels on the specimen using output generated by inspecting the specimen with an inspection system. The method also includes determining a characteristic of individual regions on the specimen using the properties of the individual pixels in the individual regions. The method further includes monitoring the characteristic of the specimen based on the characteristics of the individual regions.