The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 17, 2013
Filed:
Apr. 17, 2012
Sjoerd Nicolaas Lambertus Donders, Vught, NL;
Vadim Yevgenyevich Banine, Deurne, NL;
Johannes Hubertus Josephina Moors, Helmond, NL;
Martinus Cornelis Maria Verhagen, Valkenswaard, NL;
Olav Waldemar Vladimir Frijns, Rosmalen, NL;
Gerrit Van Donk, Vollenhove, NL;
Henk Jan Van Gerner, Zwolle, NL;
Sjoerd Nicolaas Lambertus Donders, Vught, NL;
Vadim Yevgenyevich Banine, Deurne, NL;
Johannes Hubertus Josephina Moors, Helmond, NL;
Martinus Cornelis Maria Verhagen, Valkenswaard, NL;
Olav Waldemar Vladimir Frijns, Rosmalen, NL;
Gerrit Van Donk, Vollenhove, NL;
Henk Jan Van Gerner, Zwolle, NL;
ASML Netherlands B.V., Veldhoven, NL;
Stichting Nationaal Lucht—en Ruimtevaartlaboratorium, Amsterdam, NL;
Abstract
A conditioning system for conditioning a part of a lithographic apparatus, includes an evaporator positioned in thermal contact with the part for extracting heat from the part by evaporation of a fluid inside the evaporator; a condenser for removing heat from the fluid inside the condenser; fluid lines arranged between the evaporator and the condenser to form a fluid circuit; a pump arranged in the circuit to circulate the fluid in the circuit; an accumulator to hold fluid, wherein the accumulator is in fluid communication with the circuit and comprises a heat exchanger to transfer heat from or to fluid inside the accumulator; a temperature sensor to provide a signal representative of the fluid temperature; and a controller to maintain a substantially constant temperature of the fluid inside the circuit by regulating the amount of heat transferred by the heat exchanger based on the signal.