The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 17, 2013
Filed:
Mar. 08, 2013
Applicant:
Jsr Corporation, Tokyo, JP;
Inventors:
Hiromitsu Nakashima, Tokyo, JP;
Reiko Kimura, Tokyo, JP;
Kazuo Nakahara, Tokyo, JP;
Mitsuo Sato, Tokyo, JP;
Assignee:
JSP Corporation, Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G03F 7/038 (2006.01); G03F 7/039 (2006.01);
U.S. Cl.
CPC ...
Abstract
A radiation-sensitive resin composition includes a polymer having a structural unit represented by a formula (I). In the formula (I), Rrepresents a hydrogen atom or a methyl group. X represents a bivalent alicyclic hydrocarbon group not having or having a substituent. Y represents a bivalent hydrocarbon group having 1 to 20 carbon atoms. Rrepresents a methyl group or a trifluoromethyl group.