The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 17, 2013
Filed:
Sep. 23, 2011
Toru Kimura, Tokyo, JP;
Hiromitsu Nakashima, Tokyo, JP;
Reiko Kimura, Tokyo, JP;
Kazuki Kasahara, Tokyo, JP;
Masafumi Hori, Tokyo, JP;
Masafumi Yoshida, Tokyo, JP;
Toru Kimura, Tokyo, JP;
Hiromitsu Nakashima, Tokyo, JP;
Reiko Kimura, Tokyo, JP;
Kazuki Kasahara, Tokyo, JP;
Masafumi Hori, Tokyo, JP;
Masafumi Yoshida, Tokyo, JP;
JSR Corporation, Tokyo, JP;
Abstract
A radiation-sensitive resin composition that includes (A) a polymer that includes a repeating unit (a1) and a fluorine atom, the repeating unit (a1) including a group shown by the following formula (1) or (2), the radiation-sensitive resin composition including the polymer (A) in an amount of 0.1 mass % or more and less than 20 mass % based on the total amount of polymers included in the radiation-sensitive resin composition.