The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 10, 2013
Filed:
Apr. 22, 2011
IR Kusnadi, San Jose, CA (US);
Thuy Q DO, San Jose, CA (US);
Yuri Granik, Palo Alto, CA (US);
John L Sturtevant, Beaverton, OR (US);
Ir Kusnadi, San Jose, CA (US);
Thuy Q Do, San Jose, CA (US);
Yuri Granik, Palo Alto, CA (US);
John L Sturtevant, Beaverton, OR (US);
Mentor Graphics Corporation, Wilsonville, OR (US);
Abstract
Techniques for model calibration and alignment of measurement contours of printed layout features with simulation contours obtained with a model are disclosed. With various implementations of the invention, contour point errors are determined. Based on the contour point errors and a cost function, values of alignment parameters may be determined. The values of alignment parameters may be used to realign the measurement contours for model calibration. The alignment may be conducted concurrently with model calibration.