The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 10, 2013
Filed:
Feb. 06, 2012
Yuko Iwabuchi, Mito, JP;
Hideo Todokoro, Nishitama-gun, JP;
Hiroyoshi Mori, Hitachinaka, JP;
Mitsugu Sato, Hitachinaka, JP;
Yasutsugu Usami, Toshina-ku, JP;
Mikio Ichihashi, Kodaira, JP;
Satoru Fukuhara, Hitachinaka, JP;
Hiroyuki Shinada, Chofu, JP;
Yutaka Kaneko, Hachiouji, JP;
Katsuya Sugiyama, Kashiwa, JP;
Atsuko Takafuji, Nerima-ku, JP;
Hiroshi Toyama, Hachiouji, JP;
Yuko Iwabuchi, Mito, JP;
Hideo Todokoro, Nishitama-gun, JP;
Hiroyoshi Mori, Hitachinaka, JP;
Mitsugu Sato, Hitachinaka, JP;
Yasutsugu Usami, Toshina-ku, JP;
Mikio Ichihashi, Kodaira, JP;
Satoru Fukuhara, Hitachinaka, JP;
Hiroyuki Shinada, Chofu, JP;
Yutaka Kaneko, Hachiouji, JP;
Katsuya Sugiyama, Kashiwa, JP;
Atsuko Takafuji, Nerima-ku, JP;
Hiroshi Toyama, Hachiouji, JP;
Hitachi, Ltd., Tokyo, JP;
Abstract
The inspection apparatus disclosed generates an electron beam, an acceleration electrode accelerates the electron beam, a convergence lens converges the electron beam, an electron beam deflector scans the beam over a sample, an objective lens converges the electron beam on the sample, a detector located between the sample and the objective lens detects charged particles emitted from the sample, a power supply applies a retarding voltage to the sample for decelerating the electron beam to the sample, an electrode is disposed between the objective lens and the sample, and a voltage is generated between the sample and the electrode by said electrode, the voltage being determined depending on the sample. The apparatus solves problems encountered in conventional inspection systems.