The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 26, 2013
Filed:
Aug. 24, 2010
Mikhail Korolik, San Jose, CA (US);
Erik M. Freer, Campbell, CA (US);
John M. DE Larios, Palo Alto, CA (US);
Katrina Mikhaylichenko, San Jose, CA (US);
Mike Ravkin, Sunnyvale, CA (US);
Fritz Redeker, Fremont, CA (US);
Mikhail Korolik, San Jose, CA (US);
Erik M. Freer, Campbell, CA (US);
John M. de Larios, Palo Alto, CA (US);
Katrina Mikhaylichenko, San Jose, CA (US);
Mike Ravkin, Sunnyvale, CA (US);
Fritz Redeker, Fremont, CA (US);
Lam Research Corporation, Fremont, CA (US);
Abstract
A substrate holder is defined to support a substrate. A rotating mechanism is defined to rotate the substrate holder. An applicator is defined to extend over the substrate holder to dispense a cleaning material onto a surface of the substrate when present on the substrate holder. The applicator is defined to apply a downward force to the cleaning material on the surface of the substrate. In one embodiment the cleaning material is gelatinous.