The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 19, 2013
Filed:
Aug. 10, 2012
Faysal Boughorbel, Eindhoven, NL;
Pavel Potocek, Eindhoven, NL;
Cornelis Sander Kooijman, Veldhoven, NL;
Berend Helmerus Lich, Weert, NL;
Faysal Boughorbel, Eindhoven, NL;
Pavel Potocek, Eindhoven, NL;
Cornelis Sander Kooijman, Veldhoven, NL;
Berend Helmerus Lich, Weert, NL;
FEI Company, Hillsboro, OR (US);
Abstract
A method of charged-particle microscopy, comprising: irradiating a sample surface S to cause radiation to emanate from the sample; detecting at least a portion of said emitted radiation recording an output Oof said detector arrangement as a function of emergence angle θof said emitted radiation, measured relative to an axis normal to S thus compiling a measurement set M={(O, θ)} for a plurality of values of θ; automatically deconvolving the measurement set M and spatially resolve it into a result set R={(V, L)},in which a spatial variable V demonstrates a value Vat an associated discrete death level Lreferenced to the surface S, whereby n and K are members of an integer sequence, and spatial variable V represents a physical property of the sample as a function of position in its bulk.