The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 19, 2013
Filed:
Mar. 06, 2008
Kuno Mayer, Freiburg, DE;
Monica Aleman, Brussels, BE;
Daniel Kray, Freiburg, DE;
Stefan Glunz, Freiburg, DE;
Ansgar Mette, Leipzig, DE;
Ralf Preu, Freiburg, DE;
Andreas Grohe, Berlin, DE;
Kuno Mayer, Freiburg, DE;
Monica Aleman, Brussels, BE;
Daniel Kray, Freiburg, DE;
Stefan Glunz, Freiburg, DE;
Ansgar Mette, Leipzig, DE;
Ralf Preu, Freiburg, DE;
Andreas Grohe, Berlin, DE;
Fraunhofer-Gesellschaft zur föderung der angewandten Forschung e.V., München, DE;
Albert-Ludwigs-Universität Freiburg, Freiburg, DE;
Abstract
The invention relates to a method for the precision processing of substrates, in particular for the microstructuring of thin layers, local dopant introduction and also local application of a metal nucleation layer in which a liquid-assisted laser, i.e. laser irradiation of a substrate which is covered in the regions to be processed by a suitable reactive liquid, is implemented.