The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 29, 2013
Filed:
Oct. 01, 2010
Yuji Kamikawa, Koshi, JP;
Hiroaki Inadomi, Koshi, JP;
Hideyuki Yamamoto, Koshi, JP;
Hiroshi Komiya, Koshi, JP;
Koji Egashira, Koshi, JP;
Yuji Kamikawa, Koshi, JP;
Hiroaki Inadomi, Koshi, JP;
Hideyuki Yamamoto, Koshi, JP;
Hiroshi Komiya, Koshi, JP;
Koji Egashira, Koshi, JP;
Tokyo Electron Limited, Minato-Ku, JP;
Abstract
An ultrasonic cleaning apparatus including: a cleaning tank for storing a cleaning liquid; an object-to-be-processed holder for insertion into the cleaning tank, the holder holding an object to be processed and immersing the object into the cleaning liquid; a vibrator disposed on a bottom part of the cleaning tank; and an ultrasonic oscillator configured to make the vibrator ultrasonically vibrate. In the cleaning tank, a lateral holding member configured to hold the object is disposed. The holder is configured to be laterally moved by a driving apparatus. The control device is configured to control the driving apparatus such that the holder is laterally moved after the object has been held by the lateral holding member, and the control device is configured to control the ultrasonic oscillator such that the vibrator is made to ultrasonically vibrate so that the ultrasonic vibration from the vibrator is propagated to the object.