The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 08, 2013
Filed:
Sep. 07, 2010
Hiroaki Shishido, Yokohama, JP;
Yasuhiro Yoshitake, Yokosuka, JP;
Toshihiko Nakata, Hiratsuka, JP;
Shunji Maeda, Yokohama, JP;
Minoru Yoshida, Yokohama, JP;
Sachio Uto, Yokohama, JP;
Hiroaki Shishido, Yokohama, JP;
Yasuhiro Yoshitake, Yokosuka, JP;
Toshihiko Nakata, Hiratsuka, JP;
Shunji Maeda, Yokohama, JP;
Minoru Yoshida, Yokohama, JP;
Sachio Uto, Yokohama, JP;
Hitachi, Ltd., Tokyo, JP;
Abstract
An inspection apparatus and method includes a light source, an illuminating unit having a polarization controller and an object lens for illuminating a specimen with light emitted from the light source and passed through the polarization controller and the object lens, a detection unit having a sensor for detecting light from the specimen illuminated by the illuminating unit, a processor which processes a signal output from the sensor so as to detect a defect on the specimen, and a display which displays information output from the processor. The processor processes an image formed from the signal output from the sensor in which the image is reduced in speckle pattern.