The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 08, 2013
Filed:
Jun. 15, 2012
Tetsuya Ishikawa, Saratoga, CA (US);
Rick J. Roberts, San Jose, CA (US);
Helen R. Armer, Cupertino, CA (US);
Leon Volfovski, Mountain View, CA (US);
Jay D. Pinson, San Jose, CA (US);
Michael Rice, Pleasanton, CA (US);
David H. Quach, San Jose, CA (US);
Mohsen S. Salek, Saratoga, CA (US);
Robert Lowrance, Los Gatos, CA (US);
John A. Backer, San Jose, CA (US);
William Tyler Weaver, Austin, TX (US);
Charles Carlson, Cedar Park, TX (US);
Chongyang Wang, San Jose, CA (US);
Jeffrey Hudgens, San Francisco, CA (US);
Harald Herchen, Los Altos, CA (US);
Brian Lue, Mountain View, CA (US);
Tetsuya Ishikawa, Saratoga, CA (US);
Rick J. Roberts, San Jose, CA (US);
Helen R. Armer, Cupertino, CA (US);
Leon Volfovski, Mountain View, CA (US);
Jay D. Pinson, San Jose, CA (US);
Michael Rice, Pleasanton, CA (US);
David H. Quach, San Jose, CA (US);
Mohsen S. Salek, Saratoga, CA (US);
Robert Lowrance, Los Gatos, CA (US);
John A. Backer, San Jose, CA (US);
William Tyler Weaver, Austin, TX (US);
Charles Carlson, Cedar Park, TX (US);
Chongyang Wang, San Jose, CA (US);
Jeffrey Hudgens, San Francisco, CA (US);
Harald Herchen, Los Altos, CA (US);
Brian Lue, Mountain View, CA (US);
Applied Materials, Inc., Santa Clara, CA (US);
Abstract
Embodiments of the invention generally include a robot assembly comprising a robot operable to position a substrate at one or more points within a plane, and a motion assembly having a motor operable to position the robot in a direction generally parallel to a first direction. The motion assembly comprises a robot support interface having the robot coupled thereto, and one or more walls that form an interior region in which the motor is enclosed. The walls define an elongated opening through which the robot support interface travels, and the motor is operable to move the robot support interface laterally in the elongated opening. The motion assembly further comprises one or more fan assemblies that are in fluid communication with the interior region. The fan assemblies are operable to create a subatmospheric pressure in the interior region thereby causing gas to flow through the elongated opening into the interior region.