The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 24, 2013
Filed:
Aug. 09, 2012
Steven Mayer, Lake Oswego, OR (US);
Shantinath Ghongadi, Tigard, OR (US);
Kousik Ganesan, Tualatin, OR (US);
Zhian He, Tigard, OR (US);
Jingbin Feng, Lake Oswego, OR (US);
Steven Mayer, Lake Oswego, OR (US);
Shantinath Ghongadi, Tigard, OR (US);
Kousik Ganesan, Tualatin, OR (US);
Zhian He, Tigard, OR (US);
Jingbin Feng, Lake Oswego, OR (US);
Novellus Systems, Inc., Fremont, CA (US);
Abstract
An apparatus for electroplating a layer of metal onto a work piece surface includes a membrane separating the chamber of the apparatus into a catholyte chamber and an anolyte chamber. In the catholyte chamber is a catholyte manifold region that includes a catholyte manifold and at least one flow distribution tube. The catholyte manifold and at least one flow distribution tube serve to mix and direct catholyte flow in the catholyte chamber. The provided configuration effectively reduces failure and improves the operational ranges of the apparatus.