The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 10, 2013
Filed:
Oct. 12, 2005
Cho Huak Teh, Cupertino, CA (US);
Tommaso Torelli, Berkeley, CA (US);
Dominic David, Campbell, CA (US);
Chiuman Yeung, Sunnyvale, CA (US);
Michael Gordon Scott, Santa Cruz, CA (US);
Lalita A. Balasubramanian, Fremont, CA (US);
Lisheng Gao, Morgan Hill, CA (US);
Tong Huang, San Jose, CA (US);
Jianxin Zhang, Santa Clara, CA (US);
Michal Kowalski, Santa Cruz, CA (US);
Jonathan Oakley, Sunnyvale, CA (US);
Cho Huak Teh, Cupertino, CA (US);
Tommaso Torelli, Berkeley, CA (US);
Dominic David, Campbell, CA (US);
Chiuman Yeung, Sunnyvale, CA (US);
Michael Gordon Scott, Santa Cruz, CA (US);
Lalita A. Balasubramanian, Fremont, CA (US);
Lisheng Gao, Morgan Hill, CA (US);
Tong Huang, San Jose, CA (US);
Jianxin Zhang, Santa Clara, CA (US);
Michal Kowalski, Santa Cruz, CA (US);
Jonathan Oakley, Sunnyvale, CA (US);
KLA-Tencor Technologies Corp., Milpitas, CA (US);
Abstract
Various computer-implemented methods for classifying defects on a specimen are provided. One method includes assigning individual defects detected on the specimen to defect groups based on one or more characteristics of the individual defects. The method also includes displaying information about the defect groups to a user. In addition, the method includes allowing the user to assign a classification to each of the defect groups. Systems configured to classify defects on a specimen are also provided. One system includes program instructions executable on a processor for assigning individual defects detected on the specimen to defect groups based on one or more characteristics of the individual defects. The system also includes a user interface configured for displaying information about the defect groups to a user and allowing the user to assign a classification to each of the defect groups.