The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 03, 2013
Filed:
May. 10, 2012
Richard L. Sandstrom, Encinitas, CA (US);
Tae (Mark) H. Chung, Murrieta, CA (US);
Richard C. Ujazdowski, Poway, CA (US);
Richard L. Sandstrom, Encinitas, CA (US);
Tae (Mark) H. Chung, Murrieta, CA (US);
Richard C. Ujazdowski, Poway, CA (US);
CYMER, Inc., San Diego, CA (US);
Abstract
A movable electrode assembly for use in a laser system, includes a first electrode having a first discharge surface, a second electrode having a second discharge surface. The second electrode being arranged opposite from the first electrode. The second discharge surface being spaced apart from the first discharge surface by a discharge gap. A discharge gap adjuster interfaced with at least one of the second electrode or the first electrode, the discharge gap adjuster configured to adjust the discharge gap. A method of adjusting a discharge gap is also disclosed.