The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 03, 2013
Filed:
Nov. 10, 2010
Koukichi Hiroshiro, Koshi, JP;
Takanori Nishi, Koshi, JP;
Takahiro Kitano, Koshi, JP;
Shoichi Terada, Koshi, JP;
Koukichi Hiroshiro, Koshi, JP;
Takanori Nishi, Koshi, JP;
Takahiro Kitano, Koshi, JP;
Shoichi Terada, Koshi, JP;
Tokyo Electron Limited, Tokyo, JP;
Abstract
In a template treatment of forming a film of a release agent on a treatment surface of a template, the treatment surface of the template is first cleaned. Thereafter, in a coating unit, the release agent is applied to the treatment surface of the template. The release agent on the template is then dried. Then, alcohol is applied to the release agent on the template to make the release agent adhere to the treatment surface of the template and to remove an unreacted portion of the release agent. Thereafter, the alcohol on the template is dried and removed. In this manner, a film of the release agent is formed in a predetermined film thickness on the treatment surface of the template.