The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 20, 2013
Filed:
Dec. 23, 2010
Guido DE Boer, Leerdam, NL;
Johnny Joannes Jacobus Van Baar, Hengelo, NL;
Kaustubh Prabodh Padhye, Zoetermeer, NL;
Robert Mossel, Capelle A/D Ijssel, NL;
Niels Vergeer, Rotterdam, NL;
Stijn Willem Herman Karel Steenbrink, Den Haag, NL;
Guido De Boer, Leerdam, NL;
Johnny Joannes Jacobus Van Baar, Hengelo, NL;
Kaustubh Prabodh Padhye, Zoetermeer, NL;
Robert Mossel, Capelle A/D Ijssel, NL;
Niels Vergeer, Rotterdam, NL;
Stijn Willem Herman Karel Steenbrink, Den Haag, NL;
Mapper Lithography IP B.V., Delft, NL;
Abstract
An integrated sensory system for a lithography machine with a projection lens system () for focusing one or more exposure beams onto a target, a moveable table () for carrying the target (), a capacitive sensing system () for making a measurement related to a distance between a final focusing element of the projection lens system () and a surface of a target (), and a control unit () for controlling movement of the moveable table () to adjust a position of the target () based at least in part on a signal from the capacitive sensing system. The capacitive sensing system () has a plurality of capacitive sensors (), each having a thin film structure. The capacitive sensors and the final focusing element () of the projection lens system are mounted directly to a common base (), and the sensors are located in close proximity to an edge of the final focusing element of the projection lens system.