The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 20, 2013
Filed:
May. 21, 2010
Applicants:
Hsin-chieh Yao, Douliu, TW;
Hsien-cheng Wang, Hsinchu, TW;
Chien-kai Huang, Zhubei, TW;
Chun-kuang Chen, Hsin-Chu Hsien, TW;
Inventors:
Hsin-Chieh Yao, Douliu, TW;
Hsien-Cheng Wang, Hsinchu, TW;
Chien-Kai Huang, Zhubei, TW;
Chun-Kuang Chen, Hsin-Chu Hsien, TW;
Assignee:
Taiwan Semiconductor Manufacturing Company, Ltd., Hsin-Chu, unknown;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 23/544 (2006.01); H01L 21/28 (2006.01);
U.S. Cl.
CPC ...
Abstract
A method and apparatus for alignment are disclosed. An exemplary apparatus includes a substrate having an alignment region; an alignment feature in the alignment region of the substrate; and a dummy feature disposed within the alignment feature. A dimension of the dummy feature is less than a resolution of an alignment mark detector.