The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 06, 2013
Filed:
Jun. 16, 2010
Applicants:
Everhardus Cornelis Mos, Best, NL;
Hubertus Johannes Gertrudus Simons, Venlo, NL;
Scott Anderson Middlebrooks, Duizel, NL;
Inventors:
Everhardus Cornelis Mos, Best, NL;
Hubertus Johannes Gertrudus Simons, Venlo, NL;
Scott Anderson Middlebrooks, Duizel, NL;
Assignee:
ASML Netherlands B.V., Veldhoven, NL;
Primary Examiner:
Int. Cl.
CPC ...
G06F 7/60 (2006.01); G06F 17/10 (2006.01);
U.S. Cl.
CPC ...
Abstract
A method for selecting sample positions on a substrate from a set of all available sample positions is provided, in which a representation of a model, which may represent the variation of one or more properties across the substrate, is analyzed in order to identify the sample positions having the greatest effect on the model.