The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 06, 2013
Filed:
May. 18, 2010
Applicants:
Anthony Zampini, Westborough, MA (US);
Vipul Jain, Westborough, MA (US);
Cong Liu, Shrewsbury, MA (US);
Suzanne Coley, Mansfield, MA (US);
Owendi Ongayi, Marlborough, MA (US);
Inventors:
Anthony Zampini, Westborough, MA (US);
Vipul Jain, Westborough, MA (US);
Cong Liu, Shrewsbury, MA (US);
Suzanne Coley, Mansfield, MA (US);
Owendi Ongayi, Marlborough, MA (US);
Assignee:
Rohm and Haas Electronic Materials LLC, Marlborough, MA (US);
Primary Examiner:
Int. Cl.
CPC ...
G03F 7/004 (2006.01); C07D 251/34 (2006.01); C08G 73/08 (2006.01);
U.S. Cl.
CPC ...
Abstract
Cyanurate compositions are provided that are particularly useful as a reagent to form a resin component of a coating composition underlying an overcoated photoresist. Preferred isocyanurates compound comprise substitution of multiple cyanurate nitrogen ring atoms by at least two distinct carboxy and/or carboxy ester groups.