The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 23, 2013
Filed:
Jun. 19, 2009
Applicants:
Haiguang Chen, Mountain View, CA (US);
Daniel Kavaldjiev, San Jose, CA (US);
Louis Vintro, Portland, OR (US);
George Kren, Los Altos Hills, CA (US);
Inventors:
Haiguang Chen, Mountain View, CA (US);
Daniel Kavaldjiev, San Jose, CA (US);
Louis Vintro, Portland, OR (US);
George Kren, Los Altos Hills, CA (US);
Assignee:
KLA-Tencor Corp., Milpitas, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G06F 19/00 (2011.01);
U.S. Cl.
CPC ...
Abstract
Computer-implemented methods, computer-readable media, and systems for determining one or more characteristics of a wafer are provided.