The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 09, 2013
Filed:
Oct. 04, 2006
Erik M. Freer, Campbell, CA (US);
John M. DE Larios, Palo Alto, CA (US);
Katrina Mikhaylichenko, San Jose, CA (US);
Michael Ravkin, Sunnyvale, CA (US);
Mikhail Korolik, San Jose, CA (US);
Fritz C. Redeker, Fremont, CA (US);
Erik M. Freer, Campbell, CA (US);
John M. de Larios, Palo Alto, CA (US);
Katrina Mikhaylichenko, San Jose, CA (US);
Michael Ravkin, Sunnyvale, CA (US);
Mikhail Korolik, San Jose, CA (US);
Fritz C. Redeker, Fremont, CA (US);
Lam Research Corporation, Fremont, CA (US);
Abstract
A method and system for cleaning a surface, having particulate matter thereon, of a substrate features impinging upon the surface a jet of a liquid having coupling elements entrained therein. A sufficient drag force is imparted upon the coupling elements to have the same move with respect to the liquid and cause the particulate matter to move with respect to the substrate.