The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 11, 2013
Filed:
Mar. 31, 2011
Kai-chung Hou, San Diego, CA (US);
Richard L. Sandstrom, Encinitas, CA (US);
William N. Partlo, Poway, CA (US);
Daniel J. W. Brown, San Diego, CA (US);
Igor V. Fomenkov, San Diego, CA (US);
Kai-Chung Hou, San Diego, CA (US);
Richard L. Sandstrom, Encinitas, CA (US);
William N. Partlo, Poway, CA (US);
Daniel J. W. Brown, San Diego, CA (US);
Igor V. Fomenkov, San Diego, CA (US);
Cymer, Inc., San Diego, CA (US);
Abstract
As disclosed herein, in a first aspect, a device may comprise: an oscillator producing a light output on a beam path; a target material for interaction with light on the beam path at an irradiation site; a beam delay on the beam path the beam delay having a beam folding optical arrangement; and a switch positioned along the beam path and interposed between the oscillator and the beam delay; the switch closable to divert at least a portion of light on the beam path from the beam path, the switch having close time, tand the beam path having a length, L, along the path from the switch to the irradiation site; with t<cL, where c is the speed of light on the path, to protect the oscillator.