The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
May. 21, 2013

Filed:

May. 26, 2010
Applicants:

Richard Carter, Dresden, DE;

Falk Graetsch, Dresden, DE;

Martin Trentzsch, Dresden, DE;

Sven Beyer, Dresden, DE;

Berthold Reimer, Dresden, DE;

Robert Binder, Dresden, DE;

Boris Bayha, Dresden, DE;

Inventors:

Richard Carter, Dresden, DE;

Falk Graetsch, Dresden, DE;

Martin Trentzsch, Dresden, DE;

Sven Beyer, Dresden, DE;

Berthold Reimer, Dresden, DE;

Robert Binder, Dresden, DE;

Boris Bayha, Dresden, DE;

Assignee:

GLOBALFOUNDRIES Inc., Grand Cayman, KY;

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 21/3205 (2006.01); H01L 21/4763 (2006.01); H01L 21/8238 (2006.01);
U.S. Cl.
CPC ...
Abstract

Sophisticated gate electrode structures for N-channel transistors and P-channel transistors are patterned on the basis of substantially the same configuration while, nevertheless, the work function adjustment may be accomplished in an early manufacturing stage. For this purpose, diffusion layer and cap layer materials are removed after incorporating the desired work function metal species into the high-k dielectric material and subsequently a common gate layer stack is deposited and subsequently patterned.


Find Patent Forward Citations

Carter, Richard. (2013). Uniform high-k metal gate stacks by adjusting threshold voltage for sophisticated transistors by diffusing a metal species prior to gate patterning (U.S. Patent No. 8445344). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/8445344

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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