The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 21, 2013
Filed:
Aug. 13, 2008
Yukio Ozaki, Toyama, JP;
Teruo Yoshino, Kanazawa, JP;
Satoru Takahata, Imizu, JP;
Reizo Nunozawa, Toyama, JP;
Yukio Ozaki, Toyama, JP;
Teruo Yoshino, Kanazawa, JP;
Satoru Takahata, Imizu, JP;
Reizo Nunozawa, Toyama, JP;
Hitachi Kokusai Electric Inc., Tokyo, JP;
Abstract
To automatically purge a transfer chamber by means of inert gas. There is provided a substrate processing apparatus including a controller that performs control so that a transfer chamberconnected to a processing chamberfor processing a substrate is purged by gas, the controller having a switching unit that switches a function of exhausting the gas in the transfer chamberin a set direction, and a function of circulating the gas through the transfer chamberin an inert gas atmosphere.