The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 14, 2013
Filed:
Sep. 25, 2008
Shigeru Kasai, Nirasaki, JP;
Tomohiro Suzuki, Nirasaki, JP;
Sumi Tanaka, Nirasaki, JP;
Masatake Yoneda, Nirasaki, JP;
Hiroyuki Miyashita, Nirasaki, JP;
Shigeru Kasai, Nirasaki, JP;
Tomohiro Suzuki, Nirasaki, JP;
Sumi Tanaka, Nirasaki, JP;
Masatake Yoneda, Nirasaki, JP;
Hiroyuki Miyashita, Nirasaki, JP;
Tokyo Electron Limited, Tokyo, JP;
Abstract
Disclosed is an annealing device that includes a processing chamber into which a wafer is received, a heating source having a plurality of light emitting diodes (LEDs) for emitting a light toward the wafer, which faces the surface of the wafer, and a light transmissive member provided corresponding to the heating source, into which the light from the light emitting elements is transmitted. The heating source has the light emitting elements attached on a support toward the wafer. Each of the light emitting elements is individually covered with a lens layer made of a transparent resin.